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Journal: RSC Advances
Article Title: Fabrication and characterization of an Al 2 O 3 /OPSZ/Al 2 O 3 barrier film on a PEN substrate via PEALD and spray-spin coating techniques
doi: 10.1039/d4ra08383k
Figure Lengend Snippet: Optical microscope images (A)–(D) and SEM cross-sectional images (a)–(d) of OPSZ layers on PEN substrate.
Article Snippet: The microstructures of the films at varying preparation steps were characterized by applying a
Techniques: Microscopy